laser confocal microscope

Lext with excellent accuracy and optical performance ™ The ols5100 laser scanning microscope is equipped with intelligent tools to make the system easier to use. It can quickly and efficiently complete the accurate measurement of submicron morphology and surface roughness, which not only simplifies the workflow, but also allows you to obtain reliable high-quality data

1. A new generation of laser confocal microscope combines "accurate measurement" and "easy operation"

2.5 laser technologies, 3 kinds of 3D observation modes, true color full focus, high resolution full focus and height information.

3.7 measurement modes: height measurement, area / volume measurement, geometry measurement, surface roughness measurement, particle measurement, film thickness measurement, automatic edge finding processing

4. 405nm semiconductor laser is used to measure the total magnification of 108x-17280x.

5. The maximum field of vision is 2.5mm, the maximum resolution is 0.12um, accurate measurement, and the repeatability of height measurement is 0.012um.

6. World's highest resolution scanning in surface roughness measurement, 16.6m pixel mode, 100x objective lens, 0.03um

7. It can obtain two-dimensional morphological image, three-dimensional morphological image, three-dimensional contour and terrain image for submicron measurement

8. Very simple operation, operation navigation, multi-user sharing, random observation angle, automatic report generation, etc

9. Different from SEM, the measurement is non-destructive, non-contact, without sample preparation, conducting treatment and vacuum.

10. Standard electric 100x100 mm stage, sample height 100 mm

Type 11.300, electric 300X300mm stage, 12 "wafer and other large sample inspection, the maximum height of sample is 32mm